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HLF800 series | Ultrasonic Flow meter
[Measurement Equipment [ Flow meters ]]


Advanced signal processing with DSP (Digital Signal Processor) enables accurate and stable flow measurement

Utilizing ultrasonic wave transfer in liquid measures flow speed and accurate flow rate can be calculated.
A couple of ultrasonic sensors are located in the sensor unit and transfer speed btween them with liquid flow shows the speed. The flow speed represent the flow rate inside the tube of sensor unit.

○There is no part or construction inside the tube, so the least pressure loss is expected.
○Flow rate measurement range is wide from low to high.


 ●Stable measurement by DSP (Digital Signal Processor) even with bubbly environment
bubble effect comparison

●Fitting two sensor unit to one main unit
Realizes good space factor and cost effectivity by controlling two sensors in one main unit. Different chemical, different size measurement is possible.
HLF800 series_sensor
●Good readability by VFD
VFD (Vacuum Fluorescent Display) gives very good readability in limited installation space (HLF820).
●High temperature chemical resistant
All contacting surface to the measuring liquid is made by chemical resistant NEW PFA. Genuine sel-developed ceramics element realizes the use in high temperature liquid up to 200 deg C (K type).
●Detachable cable enables easy installation
Sensor cable can be detached from the sensor unit, so the installation of the sensor unit is easily done without cable. The cable length can be selected fro 5 or 7 meters. HLFS cable
●PC monitoring is possible by RS-485 communication
"HLF800 monitor" is supplied for PC monitoring. Install the software to Windows PC and it controls the parameter setting and monitors the measurement data via RS-485 communication. HLF800 monitor

  • Flow measurement of DIW or ultrapure water for the semiconductor manufacturing process
  • Flow control of high corrosive chemical liquid
  • Flow control of slurry liquid for CMP (Chemical Mechanical Polishing)


type name & spce



Measurement Time-of-flight
Accuracy ±1% F.S.(DIW 20 deg C) 
Data update cycle 0.01 second
power source Voltage 24 V DC ±10 % (21.6 - 26.4 V)
Power 4 W approx. 5 W approx.
Display - VFD (16 charactors / 2 line)
Digital input Open collector (Max 35 V / 0.1 A x 2)
Selectable from integrated value reset
or 0 (zero) point adjustment input
Output 4-20 mA current 2
Resolution: 12bit (RLMax. = 450Ω)
Digital Open collector (Max 35 V / 0.1 A) x 2
Selectable from comparison, integrated pulse,
instantaneous frequency or error output
Interface RS-485 (MODBUS protocol, RTU mode) 
Up to 32 converters can be concatenated (address setting : 1- 32) 
Baud rate: 9600, 19200, 38400, 57600 bps
Case material ABS
Operating temperature 0 - 50 deg C (No condensation)
Weight 130 g 230 g
Installation DIN rail Panel mount

HLFS01-06 HLFS01-08 HLFS01-12
Application Ultrapure water / Pure water / Chemical liquid
Flow rate range
0 - 2 L/min
0 - 6 L/min 0 - 20 L/min 0 - 50 L/min
Tube size 1/4 inch 3/8 inch 1/2 inch 3/4 inch
Max. operating pressure
0.5 MPa (0 - 90 deg C) / 0.2 MPa (90 - 180 deg C)
Max. fluid temp.
Standard type: 0 - 90 deg C
High-temperature type: 0 - 200 deg C
Operation temperature
0 - 80 deg C
Wetted surface
Weight 90 g 110 g 130 g
160 g
Pressure loss factor 3.7863 0.6937 0.1146 0.0138
Pressure loss
⊿P: Pressure loss[KPa] ,  A: Pressure loss factor (20 deg C Pure water),  Q: Flow rate [L/min]

Connection cable between converter and sensor
ModelHLFS01 cable 5m
HLFS01 cable 7m
Lenght 5 m
7 m
Weight 150 g 210 g

Industrial Equipment TEL:81-532-41-2774