Quartz Transducer Cleaner｜W-357-1MQB-SKC
[Ultrasonic Cleaners [ Semiconductor Industry ]]
Honda Electronics introduced world-first quartz vibration type ultrasonic cleaning unit in 2006.
Ultrasonic vibration is applied to the Quartz head and cleans semiconductor wafers.
This method realizes high purity cleanliness, because cleaning chemical has no contact except Quartz glass (no contact of rubber or something else for packing). It also saves cleaning chemical liquid compared to batch system or flushing type cleaners.
Quartz head (vibration unit) may be optionally modified to appropriate shape for different applications, such as low damage cleaning, wide area cleaning, special object like beveled surface or notches.
Recently, we collaborated with ONDA Corporation and University of Arizona about to characterize the megasonic cleaning performance from the W-357-1MQB-SKC.
Here, is a schlieren video, taken for the study captures . The movement of an "acoustic brush" traveling between Quartz transducer and photomask substrate. For more details, you can visit the poster presented at the SPCC 2016 Conference titled: " Acoustic Characterization of a Photomask Cleaning System (SPCC 2016)"
Please also refer below video for the entire explanation of the product.
FeaturesLow damage cleaning for the wafers with micro-structure
■Ultrasonic vibration is applied to the Quartz head and cleans semiconductor wafers.
Cleaning chemical is filled between the quartz head and semiconductor wafer and the ultrasonic vibration can be carried via quartz head and cleaning chemical will effectively cleans the wafer with ultrasonic acceleration power.■It cleans semiconductor wafers with low damage.
Using quartz glass for chemical contact points instead of rubber packing, there is no risk of elution or wearing out of packing material and keeps high level cleanliness.
Removal of photo resist material
Removal of polymer material after etching or ashing
Cleaning Gate electrode
Post process of CMP
Model W-357-1MQB-SKC Oscillation Frequency setting separate excitation oscillation Output power 12W Output frequency 1MHz Power source 200 - 240 V AC
Dimension 180 (W) x 250 (D) x 100 (H) mm
(exclude raised part, include foot)
Weight 2.2 kg
●Output setting range: 0 - 12 W (Vibration unit is limited to 10 W continuously when air-purge is used
●Operating condition: Tmp.: 15 - 35 deg C, Rel. Hmd.: 10 - 85 %
●Rating of external drive terminal:
Ultrasonic oscillation control input: 12 V DC, 16mA or more
Alarm output: 24 V DC, 0.5 A
■Cord: Power cord (100 V type: 2m or 200 V type :3a m), control cord: (5m)ｘ4
Flow rate N/A Length 159 mm Chuck dimension dia. 24 mm Cleaning area 24 cm2 Weight 600g
●Liquid temperature: 20 - 50 deg C
●Material: Vibration unit: Quartz, Gasket: Silicon rubber, Case: PCTFE
●Output cord length: 1.5 m (PVC) + 3.5 m (PVC) with a relay connector
* Optionally, 2MHz, 3MHz is available. Please contact for the detail.