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Nozzle type cleaner "PULSE JET" point type
[Ultrasonic Cleaners [ Semiconductor Industry ]]

Overview

Features
Applying ultrasonic pressure to the water stream from the nozzle creates particle acceleration in the water and the water particle motion removes submicron contamination on the objective works.
Fresh DI water supply avoids re-contamination within the cleaning media.
Suitable for single wafer processing system.
High frequency ultrasound (megasonic) is effective for fine particle contamination.
Output power control can adjust the power and suitable for delicate object like magnetic head.


Lineup [Frequencies]
【400kHz】
W-357-P50: Combination with high power transducer for high power application

【1MHz】
W-357-1MPD: Power stabilized generator saves electric power consumption and reliable cleaning power.
W-357P-25CG: Nozzle material is quartz and teflon and capable to use chemical solutions.

【1.5MHz】
W-357-1.5MPD: Higher frequency drive is useful for finer particle contamination. RS-422A communication is equipped.

【3MHz】
W-357-3MP: Very high, 3 MHz system. For the finest semiconductor process.

400kHz


W-357P-50
W-357P-50
click to enlarge image

Larger cleaning area than other or traditional models.
Lower frequency(400kHz) and high output power enables strong cleaning power.
P.P material is used for the horn and avoids to generate metal ion.
Usage
Cleaning after mirror polishing or before vapor deposition of GaAs wafer
Cleaning of HDD media or Si wafers
Cleaning for CMP post process
■Generator
ModelW-357P-50
Oscillation Self-excitation oscillation
(automatic frequency tracking)
Output power 100 W
Output frequency 400 kHz
Power source 100 V AC ±10 %
50/60Hz 250 VA
Dimension 232 (W) ×340 (D) ×138 (H) mm 
(exclude raised part, include foot)
Weight 6.0 kg

●Output setting range: 0 - 100 % 
●Operating condition: Tmp.: 5 - 40 deg C, Rel. Hmd.: 10 - 85 %
●Rating of external drive terminal: 
  Ultrasonic oscillation control input: 24VDC, 20mA or less
  Alarm output: 24 V DC, 20 mA or less
■Cord: Power cord(2 m), control cord(5 m x 3)

■Vibration unit
Flow rate 3.5 L/min
Length dia. 60 x 135 mm
Nozzle size dia. 8 mm
Weight 700 

●Liquid temperature: 20 - 50 deg C
●Transducer: PZT
●Material: Nozzle: Polypropylene, Gasket: Silicon rubber, Vibration plate: Tantalum
●Output code: 5 m
●Inlet: Specified tube (Outer dia. 13)

1MHz


W-357-1MPD

W-357-1MPD
click to enlarge image
Digital constant power generator. Keeping high cleaning power with low power consumption, thanks to the digital control.
Suitable to delicate cleaning such as magnetic head.
Outer diameter is only 25 mm and is easy for embedding to the existing semiconductor processing equipment.
Avoiding metal ion from horn by non-metal construction.
Capability of RS-422A interface and output power can be measured 4-20 mA current.

Generator
ModelW-357-1MPD
Oscillation Self-excitation oscillation
(automatic frequency tracking)
Output power 40 W
Output frequency 1 MHz
Power source 100 - 240 V AC, 50/60Hz, 300VA
Dimension 180 (W) ×250 (D) ×100 (H) mm 
(exclude raised part, include foot)
Weight 2.2 kg

●Output setting range: 0.1 - 40 W 
●Operating condition: Tmp.: 5 - 40 deg C, Rel. Hmd.: 10 - 85 %
●Rating of external drive terminal:
  Ultrasonic oscillation control input: 24VDC, 16mA or less
  Alarm output: 24 V DC, 0.5 A
■Cord: Power cord(100V/2m or 200V/3m), control cord(5 m x 4)

Vibration unit
Flow rate 0.9 L/min
Length dia. 25 x 80 mm
Nozzle size dia. 4 mm
Weight 300 g

●Liquid temperature: 20 - 50 deg C
●Transducer: PZT
●Material: Nozzle: PCTFE, PTFE,  Gasket: Perfluoroelastomer, Vibration plate: ceramics
●Inlet: Specified tube (Outer dia. 6 mm)
●Output code: 5 m

W-357P-25CG   

W-357P-25CG Outer diameter is only 25 mm and is easy for embedding to the existing semiconductor processing equipment.
Only Quartz and Teflon contact to the liquid, so it has strong chemical resistant.
Horn does not generate metal ion.


Generator
ModelW-357P-25CG
Oscillation Self-excitation oscillation
Output power 60 W
Output frequency 1 MHz
Output frequency 100 - 240 V AC, 50/60Hz, 200VA
Dimension 232 (W) ×340 (D) ×138 (H) mm 
(exclude raised part, include foot)
Weight 7.2 kg

●Output setting range: 30 - 40 W 
●Operating condition: Tmp.: 5 - 40 deg C, Rel. Hmd.: 10 - 85 %
●Rating of external drive terminal:
  Ultrasonic oscillation control input: 250VAC, 1A or higher
  Alarm output: 250 V AC, 3A
■Cord: Power cord(2m), Irregular output signal, Output control, Alarm(5m x 3)

■Vibration unit
Flow rate 1.2 L/min
Length dia.34 x 87 mm
Nozzle size dia. 4.2 mm
Weight 300 g

●Liquid temperature: 20 - 50 deg C
●Transducer: PZT
●material: Quarts, PTFE
●Inlet: Specified tube (Outer dia. 6 mm)
●Output code: 5 m

1.5MHz

 
W-357-1.5MPD


W-357-1.5MPD
click to enlarge image
High frequency, 1.5 MHz ultrasonic power removes finer particles.
RS-422A interface is equipped.


■Generator
ModelW-357-1.5MPD
Oscillation Self-excitation oscillation
(automatic frequency tracking)
Output power 40 W
Output frequency 1.5 MHz
Power source 100 - 240 V AC, 50/60Hz, 300VA
Dimension 180 (W) ×250 (D) ×100 (H) mm 
(exclude raised part, include foot)
Weight 2.2 kg

●Output setting range: 0.1 - 40 W
●Operating condition: Tmp.: 5 - 40 deg C, Rel. Hmd.: 10 - 85 %
●Rating of external drive terminal:
  Ultrasonic oscillation control input: 12VDC, 16mA or less
  Alarm output: 24 V DC, 0.5 A
■Cord: Power cord(100V/2m or 200V/3m), control cord(5 m x 4)

■Vibration unit
Flow rate 0.9 L/min
Length dia. 25 x 92 mm
Nozzle size dia. 4 mm
Weight 300 g

●Liquid temperature: 20 - 50 deg C
●Transducer: PZT
●Material: Nozzle: PCTFE, PTFE,  Gasket: Silicon rubber, Vibration plate: Tantalum
●Inlet: Specified tube (Outer dia. 6 mm)
●Output code: 5 m


3MHz

W-357-3MP
W-357-3MPD
click to enlarge image


Highest frequency in the series cleans super fine particles, suppressing the damage to the work at minimum.

■Generator
ModelW-357-3MPD
Oscillation Self-excitation oscillation
Output power 60 W
Output frequency 3 MHz
Power source 100 V AC, 50/60Hz, 150 VA
Dimension 180 (W) ×250 (D) ×100 (H) mm
(exclude raised part, include foot)
Weight 4.9 kg

●Output setting range: 0.1 - 40 W
●Operating condition: Tmp.: 5 - 40 deg C, Rel. Hmd.: 10 - 85 %
●Rating of external drive terminal:
  Ultrasonic oscillation control input: 12VDC, 16mA or less
  Alarm output: 24 V DC, 0.5 A
■Cord: Power cord(100V/2m or 200V/3m), control cord(5 m x 4)

■Vibration unit
Flow rate 0.9 - 1.5 L/min
Length dia. 39 x 35 x 92 mm
Nozzle size dia. 4mm
Weight 300 g

●Liquid temperature: 20 - 50 deg C
●Transducer: PZT
●Material: Nozzle: Ceramics, Gasket: Silicon rubber, Vibration plate: ceramics
●Inlet: Specified tube (Outer dia. 6 mm)
●Output code: 5 m

Industrial Equipment TEL:81-532-41-2774