SEMICONDUCTOR PROMOTION DIVISION

W-357-1.5MP

Cleaning(High Frequency）

semiconductor、LCD cleaning
The ultrasonic spray nozzle cleaners for 1.5MP type

W-357-1.5MP

●Using higher-frequency magahertz energy with accelerrated water molecules,submicron level cleaning is possible,without damaging sensitive microelectronicdevice.
●Applications include: cleaning of liquid crystal displays(LCDs),flat panel displays(FPDs), sillicon(or GaAs,sapphire,etc.)wafers (post-CMP,pre-diffusion,etc.), photomasks, reticules and numerous other applications where submicron particle removal is required.
●There is no worry of the re-adhesion of dirt in the liquid to always supply a clean cleaning solution.
●There is no worry of the re-adhesion of dirt in the liquid to always supply a clean.
●Minute dirt is instantaneously removed for the high frequency oscillation.
●It is possible to wash it at ease by the output adjustment even by the one like the magnetic head that cracks easily.
■Features
　 Higher Frequency megasonic output of 1.5MHz offers smaller submicron particle removal capability.
　 Remotely controlled by an external device using the RS-422A interface.
Model W-357-1.5MP
High Frequency Output 60Ｗ（output adjustment)
Oscillation Frequency 1.5MHz（nominal)
Power Supply AC100V/110V/220V/240V
　　200VA
Range of Liquid temperature 20～50℃
Transducer nozzle（mm） Φ4.0
Water Supply 0.9 L/min(Straight　type conector)　
Outside Dimension(mm) Generator 180（W）×250（D）×100（H)
Nozzle 29×35×92
Weight Generator 5kg
Nozzle 100g
Water Intake R(PT)1/2inch socket (Applicable tube size:outer dia. 6mm,inner
dia. 4mm)
Output Cable 5m
Power Supply Cable 2m
Protection Circuit Dry operation prevention cable ,alarm output cable ５m
Material PCTFE/Silicon rubber/Tantalum/PTFE

Semiconductor Promotion Division TEL:81-532-41-2774 MAIL:semi@honda-el.co.jp