HONDA ELECTRONICS CO.,LTD

W-357-1MQB【Wave Transfer for Rouge type】

Cleaning(High Frequency）

High-Frequency Wave Transfer Unit

	Features ■Less damage cleaning for 45 nm pattern size. ■Contact surface to liquid is only quartz. Clean level is very high. ■Less chemical solvent compared with nozzle type. ■Ultrasonic power radiation is very uniform. Application ■Resist particle cleaning. ■Polymer cleaning after etching and resist stripping process. ■Gate terminal cleaning. ■Cleaning after CMP process.

Osillater

Model		W-357-1MQB
Osillation		Adjustable separately excited osillation
Max. Power output		3W
Power adjustment		1〜3W（every0.5W）
Osillation frequency		1MHｚ
Power supply		AC85〜264V　50/60Hz
Dimension　W×D×H		185×265×100（ｍｍ）
Weight		2.2ｋｇ
Rated voltage of external drive	Ultrasonic oscillation control contact capacity (control side)	more than DC12V 18ｍA
	Alarm output contact capacity(generator side)	DC24V 0.5A
Cable length	Power cable	2ｍ×1
	External drive cable	5ｍ×1
	Alarm output cable	5ｍ×1
	Sensor cable	5ｍ×1
	4-20mA output cable	5ｍ×1

Transducer

Transducer		Special PZT transducer
Liquid temperature range		20〜50℃
Flux		more than 0.5L/min
Total length		132（mm）
Dimameter of clumping part（φ）		φ25（mm）
Irradiation area		2.8cm2
Weight		0.4ｋｇ
Material	Vibration media	Quartz glass
	Packing	FEPM
	Holder	PCTFE
Cable length(Output cord)		1m（EFP）＋5m（PVC）

Semiconductor Promotion Division TEL:81-532-41-2774 MAIL:semi@honda-el.co.jp