HONDA ELECTRONICS CO.,LTD
Ultrasonics contribute to human health
- ＨＯＭＥ
- ＞ SEMICONDUCTOR PROMOTION DIVISION
- ＞ Cleaning(High Frequency）
- ＞ W-357-1MGH【Wave Transfer for Wedge type】
W-357-1MGH【Wave Transfer for Wedge type】
Cleaning(High Frequency）
High-Frequency Wave Transfer Unit |
| Wedge type W-357-1MGH |
 |
Features ■Less damage cleaning for 45 nm pattern size. ■Less chemical solvent compared with nozzle type. ■Contact surface to liquid is only quartz. Clean level is very high. ■Cleaning side is a large area and throughput can improve. ■Ultrasonic power radiation is very uniform. Application ■Resist particle cleaning. ■Polymer cleaning after etching and resist stripping process. ■Gate terminal cleaning. ■Cleaning after CMP process. |
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| Osillater | ||
| Model | W-357-1MGH | |
| Osillation | Adjustable separately excited osillation | |
| Max. Power output | 40W | |
| Power adjustment | 1～40W（every1W） | |
| Osillation frequency | 1MHｚ | |
| Power supply | AC85～264V 50/60Hz | |
| Dimension W×D×H | 185×265×100（ｍｍ） | |
| Weight | 2.2ｋｇ | |
| Rated voltage of external drive | Ultrasonic oscillation control contact capacity (control side) | more than DC12V 18ｍA |
| Alarm output contact capacity(generator side) | DC24V 0.5A | |
| Cable length | Power cable | 2ｍ×1 |
| External drive cable | 5ｍ×1 | |
| Alarm output cable | 5ｍ×1 | |
| Sensor cable | 5ｍ×1 | |
| 4-20mA output cable | 5ｍ×1 | |
| Transducer | ||
| Transducer | Special PZT transducer | |
| Cooling water temperature | 20～50℃ | |
| Flux | 1～1.5L/min | |
| Cooling water temperature | 10～25℃ | |
| Protection circuit | With thermal protector | |
| Irradiation area | 321cm2 |
|
| Weight | 1.2ｋｇ | |
| Material | Vibration media | Quartz glass |
| Packing | FEPM | |
| Holder | PTFE | |
| Cable length(Output cable) | 1m（FEP）＋5m（PVC） | |
Semiconductor Promotion Division
TEL:81-532-41-2774
MAIL:semi@honda-el.co.jp