SEMICONDUCTOR PROMOTION DIVISION

W-357-1MBKyWave Transfer for Wedge typez

Cleaning(High Frequencyj

High-Frequency Wave Transfer Unit
1MPD
Lip Type@W-357-1MBK
ƒŠƒbƒv Features
¡Bevel and notch part of cakedparticles are cleaned.
¡Less chemical solvent than nozzle type.
¡Contact surface to liquid is only quartz.
Clean level is very high.
¡Both side of wafer are cleaned at the same time.

Application
¡Cleaning after bevel polishing
¡Bevel clean before patterning
Osicilater
Model W-357-1MBK
Osillation Adjustable separately excited osillation
Max.Power output 3W
Power adjustment 1`3Wievery0.5Wj
Osillation frequency 1MH‚š
Power supply AC85`264V@50/60Hz
Dimension@W~D~H 185~265~100i‚‚j
Weight 2.2‚‹‚‡
Rated voltage of external drive Ultrasonic oscillation control contactcapacity (control side) more than DC12V18‚A
Alarm output contactcapacity(generator side) DC24V0.5A
Cable length Power cable 2‚~1
External drive cable 5‚~1
Alarm output cable 5‚~1
Sensor cable 5‚~1
4-20mA output cable 5‚~1
Trasducer
Trasducer Special PZT transducer
Liquid temperature range 20`50Ž
Flux more than 0.5L/min
Total length 139immj
Diameter of clumping partiƒÓj ƒÓ25immj
Weight 0.4‚‹‚‡
Material Vibration media Quartz glass
Packing FEPM
Holder PCTFE
Cable length(Output cable) 1miFEPj{5miPCVj
Semiconductor Promotion Division TEL:81-532-41-2774 MAIL:semi@honda-el.co.jp