High-Frequency Wave Transfer Unit![]() |
| Lip Type@W-357-1MBK |
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Features ¡Bevel and notch part of cakedparticles are cleaned. ¡Less chemical solvent than nozzle type. ¡Contact surface to liquid is only quartz. Clean level is very high. ¡Both side of wafer are cleaned at the same time. Application ¡Cleaning after bevel polishing ¡Bevel clean before patterning |
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| Osicilater | ||
| Model | W-357-1MBK | |
| Osillation | Adjustable separately excited osillation | |
| Max.Power output | 3W | |
| Power adjustment | 1`3Wievery0.5Wj | |
| Osillation frequency | 1MH‚š | |
| Power supply | AC85`264V@50/60Hz | |
| Dimension@W~D~H | 185~265~100i‚‚j | |
| Weight | 2.2‚‹‚‡ | |
| Rated voltage of external drive | Ultrasonic oscillation control contactcapacity (control side) | more than DC12V18‚A |
| Alarm output contactcapacity(generator side) | DC24V0.5A | |
| Cable length | Power cable | 2‚~1 |
| External drive cable | 5‚~1 | |
| Alarm output cable | 5‚~1 | |
| Sensor cable | 5‚~1 | |
| 4-20mA output cable | 5‚~1 | |
| Trasducer | ||
| Trasducer | Special PZT transducer | |
| Liquid temperature range | 20`50Ž | |
| Flux | more than 0.5L/min | |
| Total length | 139immj | |
| Diameter of clumping partiƒÓj | ƒÓ25immj | |
| Weight | 0.4‚‹‚‡ | |
| Material | Vibration media | Quartz glass |
| Packing | FEPM | |
| Holder | PCTFE | |
| Cable length(Output cable) | 1miFEPj{5miPCVj | |