SEMICONDUCTOR PROMOTION DIVISION

W-357-1MPD

Cleaning(High Frequencyj

SemiconductorALCD cleaning
The ultrasonic spray nozzle cleaners
Digital control 1MHz standard type

1MPDk¬


œUsing higher-frequency magahertz energy with accelerrated water molecules,submicron level cleaning is possible,without damaging sensitive microelectronicdevice.
œApplications include:cleaning of liquid crystal displays(LCDs),flat paneldisplays(FPDs),sillicon(or GaAs,sapphire,etc.)wafers(post-CMP,pre-diffusion,etc.),photomasks,reticules and numerous other applications where submicron particle removal is required.
œThere is no worry of the re-adhesion of dirt in
the liquid to always to supply a cleancleaning solution.
œMinute dirt is instaneously removed for
the high frequency oscillation.
œIt is possible to wash it at ease by the output adjustment even by the one like the magnetic head that cracks easily.
¡Features
@ œSmall housing(25mm dia.) is another compact,space-saving unit suittable for cleaning small areas.
@ œIn the horn,the metal ion is hardly generated.
œMay be used with Device-Net type interface and offers adjustable output power in the 4-20mA range.
Model W-357-1MPD
High Frequency Output 40‚vioutput adjustment)
Oscillation Frequency 1MHzinominalj
Power Supply AC85`264V/ 50/60Hz
Range of Liquid temperature 20`50Ž
Transducer nozzle(mmj ƒ³4.0
Water Supply 0.9L/min(L type conector)@
Outside Dimension(mm) Generator 180iWj~250iDj~100iHj
Nozzle ƒ³25~80
Weight Generator 2.2kg
Nozzle 0.1Kg
Water Intake R(PT)1/2inch socket
(Applicable tube size:outer dia.6mm,inner dia.4mm)
Output Cable 5m
Power Supply Cable 2m
Protection Circuit Dry operation prevention cable,alarm output cable ‚Tm
Material PCTFE/Silicon rubber/Tantalum/PTFE

Semiconductor Promotion Division TEL:81-532-41-2774 MAIL:semi@honda-el.co.jp